Nippon Signal ECO SCAN optical scanner ESS115

Nippon Signal ECO SCAN optical scanner ESS115
ESS115
Nippon Signal ECO SCAN optical scanner ESS115

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Overview

ECO SCAN is an electromagnetic drive MEMS optical scanner. This scanner is configured by aligning permanent magnets around the monocrystal silicon substrate that forms the moving plate (with the mirror and coil on its surface), beams, and supporting section.